{"id":372288,"date":"2024-10-20T02:28:35","date_gmt":"2024-10-20T02:28:35","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-231312021\/"},"modified":"2024-10-26T04:18:52","modified_gmt":"2024-10-26T04:18:52","slug":"bs-iso-231312021","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-231312021\/","title":{"rendered":"BS ISO 23131:2021"},"content":{"rendered":"
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.<\/p>\n
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO\/IEC Guide 98-3<\/span><\/span>.<\/p>\n Ellipsometry. Principles<\/b><\/p>\nPDF Catalog<\/h4>\n
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\n PDF Pages<\/th>\n PDF Title<\/th>\n<\/tr>\n \n 2<\/td>\n undefined <\/td>\n<\/tr>\n \n 6<\/td>\n Foreword <\/td>\n<\/tr>\n \n 7<\/td>\n Introduction <\/td>\n<\/tr>\n \n 9<\/td>\n 1 Scope
2 Normative references
3 Terms, definitions, symbols and abbreviated terms
3.1 Terms and definitions
3.2 Symbols and abbreviated terms <\/td>\n<\/tr>\n\n 10<\/td>\n 4 Experimental boundary conditions with respect to the sample <\/td>\n<\/tr>\n \n 11<\/td>\n 5 Experimental boundary conditions with respect to the measurement <\/td>\n<\/tr>\n \n 12<\/td>\n 6 Model-correlated boundary conditions of the simulation
7 Basic models
7.1 General <\/td>\n<\/tr>\n\n 13<\/td>\n 7.2 Bulk material (case 1 of application)
7.3 Transparent single layer (case 2 of application)
7.4 Semi-transparent single layer (case 3 of application)
7.5 Multiple layers and periodic layers (case 4 of application)
7.6 Effective materials (case 5 of application)
8 Raw data
9 Verification of correct adjustment of the device
9.1 Straight line measurement <\/td>\n<\/tr>\n\n 14<\/td>\n 9.2 Simple measurement of angles
9.2.1 Measurement on a known sample, e.g. SiO2\/Si, with fitting of the angle of incidence <\/td>\n<\/tr>\n\n 16<\/td>\n 9.2.2 Measurement of the Brewster\u2019s angle of water, of a solvent or of technical glass <\/td>\n<\/tr>\n \n 17<\/td>\n 10 Verification of the device regarding correct calibration
11 Test report <\/td>\n<\/tr>\n\n 18<\/td>\n Annex A (informative) Mathematical and physical principles of ellipsometry <\/td>\n<\/tr>\n \n 23<\/td>\n Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" \n\n
\n Published By<\/td>\n Publication Date<\/td>\n Number of Pages<\/td>\n<\/tr>\n \n BSI<\/b><\/a><\/td>\n 2021<\/td>\n 24<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":372298,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2641],"product_tag":[],"class_list":{"0":"post-372288","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-bsi","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/372288","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/372298"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=372288"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=372288"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=372288"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}