{"id":234132,"date":"2024-10-19T15:16:15","date_gmt":"2024-10-19T15:16:15","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iec-63068-32020\/"},"modified":"2024-10-25T09:47:58","modified_gmt":"2024-10-25T09:47:58","slug":"bs-iec-63068-32020","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iec-63068-32020\/","title":{"rendered":"BS IEC 63068-3:2020"},"content":{"rendered":"

IEC 63068-3:2020 provides definitions and guidance in use of photoluminescence for detecting as-grown defects in commercially available 4H-SiC (Silicon Carbide) epitaxial wafers. Additionally, this document exemplifies photoluminescence images and emission spectra to enable the detection and categorization of the defects in SiC homoepitaxial wafers.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nundefined <\/td>\n<\/tr>\n
4<\/td>\nEnglish
CONTENTS <\/td>\n<\/tr>\n
6<\/td>\nFOREWORD <\/td>\n<\/tr>\n
8<\/td>\nINTRODUCTION <\/td>\n<\/tr>\n
9<\/td>\n1 Scope
2 Normative references
3 Terms and definitions <\/td>\n<\/tr>\n
13<\/td>\n4 Photoluminescence method
4.1 General
4.2 Principle
4.3 Requirements
4.3.1 Measuring equipment <\/td>\n<\/tr>\n
14<\/td>\nFigures
Figure 1 \u2013 Schematic diagram of PL imaging system <\/td>\n<\/tr>\n
15<\/td>\n4.3.2 Wafer positioning and focusing
4.3.3 Image capturing
4.3.4 Image processing
4.3.5 Image analysis <\/td>\n<\/tr>\n
16<\/td>\n4.3.6 Image evaluation
4.3.7 Documentation
4.4 Parameter settings
4.4.1 General
4.4.2 Parameter setting process
4.5 Procedure
4.6 Evaluation
4.6.1 General
4.6.2 Mean width of planar and volume defects <\/td>\n<\/tr>\n
17<\/td>\n4.6.3 Evaluation process
4.7 Precision
4.8 Test report
4.8.1 Mandatory elements
4.8.2 Optional elements <\/td>\n<\/tr>\n
18<\/td>\nAnnex A (informative)Photoluminescence images of defects
A.1 General
A.2 BPD <\/td>\n<\/tr>\n
19<\/td>\nA.3 Stacking fault
Figure A.1 \u2013 BPD <\/td>\n<\/tr>\n
20<\/td>\nA.4 Propagated stacking fault
Figure A.2 \u2013 Stacking fault
Figure A.3 \u2013 Propagated stacking fault <\/td>\n<\/tr>\n
21<\/td>\nA.5 Stacking fault complex
A.6 Polytype inclusion
Figure A.4 \u2013 Stacking fault complex <\/td>\n<\/tr>\n
22<\/td>\nFigure A.5 \u2013 Polytype inclusion <\/td>\n<\/tr>\n
23<\/td>\nAnnex B (informative)Photoluminescence spectra of defects
B.1 General
B.2 BPD
B.3 Stacking fault
Figure B.1 \u2013 PL spectrum from BPD <\/td>\n<\/tr>\n
24<\/td>\nFigure B.2 \u2013 PL spectra from Frank-type stacking faults
Figure B.3 \u2013 PL spectra from Shockley-type stacking faults <\/td>\n<\/tr>\n
25<\/td>\nB.4 Propagated stacking fault
B.5 Stacking fault complex
Figure B.4 \u2013 PL spectra from various stacking faultsin the wavelength range longer than 650 nm <\/td>\n<\/tr>\n
26<\/td>\nB.6 Polytype inclusion
Figure B.5 \u2013 PL spectrum from stacking fault complex
Figure B.6 \u2013 PL spectrum from polytype inclusion <\/td>\n<\/tr>\n
27<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Test method for defects using photoluminescence<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2020<\/td>\n28<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":234138,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2641],"product_tag":[],"class_list":{"0":"post-234132","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/234132","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/234138"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=234132"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=234132"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=234132"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}