BS EN 62047-20:2014
$198.66
Semiconductor devices. Micro-electromechanical devices – Gyroscopes
Published By | Publication Date | Number of Pages |
BSI | 2014 | 56 |
IEC 62047-20:2014 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes.
PDF Catalog
PDF Pages | PDF Title |
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5 | English CONTENTS |
7 | 1 Scope 2 Normative references 3 Terms and definitions 4 Essential ratings and characteristics 4.1 Categorization of gyro |
8 | 4.2 Absolute maximum ratings Tables Table 1 – Categories of gyro Table 2 – Absolute maximum ratings |
9 | 4.3 Normal operating rating 4.4 Characteristics Table 3 – Normal operating ratings |
10 | Table 4 – Characteristics |
11 | 5 Measuring methods 5.1 Scale factor 5.1.1 Purpose 5.1.2 Measuring circuit (circuit diagram) |
12 | Figures Figure 1 – Example of measuring circuit |
13 | 5.1.3 Measuring principle Figure 2 – Example of wiring configuration |
14 | Figure 3 – Example of measurement data when the angular rate is applied |
16 | Figure 4 – Example of scale factor data at each temperature |
17 | Figure 5 – Example of relationship between scale factor and scale factor temperature coefficient at each temperature |
18 | Figure 6 – Example of measurement of ratiometric error for the scale factor |
20 | Figure 7 – Example measurement of scale factor stability |
21 | Figure 8 – Example of measurement of scale factor symmetry |
22 | 5.1.4 Measurement procedures |
24 | 5.1.5 Specified conditions Table 5 – Specified condition for measurement of scale factor |
25 | 5.2 Cross axis sensitivity 5.2.1 Purpose 5.2.2 Measuring circuit (circuit diagram) |
26 | 5.2.3 Principle of measurement Figure 9 – Measuring circuit for cross axis sensitivity |
27 | Figure 10 – Principle of measurement for cross axis sensitivity |
28 | 5.2.4 Precautions to be observed during the measurements of the angular rate applied 5.2.5 Measurement procedures 5.2.6 Specified conditions |
29 | 5.3 Bias 5.3.1 Purpose 5.3.2 Measuring circuit |
30 | Figure 11 – Measuring circuit 1 for bias |
31 | 5.3.3 Principle of measurement Figure 12 – Measuring circuit 2 for bias |
33 | Figure 13 – Example measurement of ratiometric error for bias |
35 | Figure 14 – Bias temperature sensitivity and bias hysteresis |
36 | 5.3.4 Measurement procedures Figure 15 – Bias linear acceleration sensitivity |
38 | 5.3.5 Specified conditions Table 6 – Specified conditions for the measurement of bias |
39 | 5.4 Output noise 5.4.1 Purpose 5.4.2 Measuring circuit |
40 | 5.4.3 Principle of measurement Figure 16 – Output noise measuring system Figure 17 – Example of wiring configuration for output noise |
41 | 5.4.4 Precautions during measurement 5.4.5 Measurement procedures Figure 18 – Frequency power spectrums |
42 | Figure 19 – Angular random walk |
43 | Figure 20 – Bias instability and Allan variance curve |
44 | 5.4.6 Specified conditions 5.5 Frequency band 5.5.1 Purpose 5.5.2 Measuring circuit |
45 | Figure 21 – Measuring circuit for frequency response |
46 | 5.5.3 Principle of measurement Figure 22 – Example of wiring configuration for frequency response |
47 | Figure 23 – Frequency response characteristics Figure 24 – Gain peak response characteristics |
48 | 5.5.4 Precautions during measurement 5.5.5 Measurement procedure |
49 | Figure 25 – Calibration of frequency response |
50 | 5.5.6 Specified conditions 5.6 Resolution 5.6.1 Purpose 5.6.2 Measuring circuit 5.6.3 Principle of measurement Table 7 – Specified condition for the measurement of frequency band |
51 | 5.6.4 Measurement procedures |
52 | 5.6.5 Specified conditions Table 8 – Specified condition for the measurement of resolution |
53 | Annex A (informative) Accuracy of measured value of gyro characteristics A.1 General A.2 Angle and angular rate A.3 Example of angular deviation occurring after calibration |
54 | Bibliography |