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BS EN 62047-20:2014

$198.66

Semiconductor devices. Micro-electromechanical devices – Gyroscopes

Published By Publication Date Number of Pages
BSI 2014 56
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IEC 62047-20:2014 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes.

PDF Catalog

PDF Pages PDF Title
5 English
CONTENTS
7 1 Scope
2 Normative references
3 Terms and definitions
4 Essential ratings and characteristics
4.1 Categorization of gyro
8 4.2 Absolute maximum ratings
Tables
Table 1 – Categories of gyro
Table 2 – Absolute maximum ratings
9 4.3 Normal operating rating
4.4 Characteristics
Table 3 – Normal operating ratings
10 Table 4 – Characteristics
11 5 Measuring methods
5.1 Scale factor
5.1.1 Purpose
5.1.2 Measuring circuit (circuit diagram)
12 Figures
Figure 1 – Example of measuring circuit
13 5.1.3 Measuring principle
Figure 2 – Example of wiring configuration
14 Figure 3 – Example of measurement data when the angular rate is applied
16 Figure 4 – Example of scale factor data at each temperature
17 Figure 5 – Example of relationship between scale factor and scale factor temperature coefficient at each temperature
18 Figure 6 – Example of measurement of ratiometric error for the scale factor
20 Figure 7 – Example measurement of scale factor stability
21 Figure 8 – Example of measurement of scale factor symmetry
22 5.1.4 Measurement procedures
24 5.1.5 Specified conditions
Table 5 – Specified condition for measurement of scale factor
25 5.2 Cross axis sensitivity
5.2.1 Purpose
5.2.2 Measuring circuit (circuit diagram)
26 5.2.3 Principle of measurement
Figure 9 – Measuring circuit for cross axis sensitivity
27 Figure 10 – Principle of measurement for cross axis sensitivity
28 5.2.4 Precautions to be observed during the measurements of the angular rate applied
5.2.5 Measurement procedures
5.2.6 Specified conditions
29 5.3 Bias
5.3.1 Purpose
5.3.2 Measuring circuit
30 Figure 11 – Measuring circuit 1 for bias
31 5.3.3 Principle of measurement
Figure 12 – Measuring circuit 2 for bias
33 Figure 13 – Example measurement of ratiometric error for bias
35 Figure 14 – Bias temperature sensitivity and bias hysteresis
36 5.3.4 Measurement procedures
Figure 15 – Bias linear acceleration sensitivity
38 5.3.5 Specified conditions
Table 6 – Specified conditions for the measurement of bias
39 5.4 Output noise
5.4.1 Purpose
5.4.2 Measuring circuit
40 5.4.3 Principle of measurement
Figure 16 – Output noise measuring system
Figure 17 – Example of wiring configuration for output noise
41 5.4.4 Precautions during measurement
5.4.5 Measurement procedures
Figure 18 – Frequency power spectrums
42 Figure 19 – Angular random walk
43 Figure 20 – Bias instability and Allan variance curve
44 5.4.6 Specified conditions
5.5 Frequency band
5.5.1 Purpose
5.5.2 Measuring circuit
45 Figure 21 – Measuring circuit for frequency response
46 5.5.3 Principle of measurement
Figure 22 – Example of wiring configuration for frequency response
47 Figure 23 – Frequency response characteristics
Figure 24 – Gain peak response characteristics
48 5.5.4 Precautions during measurement
5.5.5 Measurement procedure
49 Figure 25 – Calibration of frequency response
50 5.5.6 Specified conditions
5.6 Resolution
5.6.1 Purpose
5.6.2 Measuring circuit
5.6.3 Principle of measurement
Table 7 – Specified condition for the measurement of frequency band
51 5.6.4 Measurement procedures
52 5.6.5 Specified conditions
Table 8 – Specified condition for the measurement of resolution
53 Annex A (informative) Accuracy of measured value of gyro characteristics
A.1 General
A.2 Angle and angular rate
A.3 Example of angular deviation occurring after calibration
54 Bibliography
BS EN 62047-20:2014
$198.66