UNE-EN 62047-17:2015
$23.40
Semiconductor devices – Micro-electromechanical devices – Part 17: Bulge test method for measuring mechanical properties of thin films
| Published By | Publication Date | Number of Pages |
| AENOR | 2015-08-01 | 31 |
| Published Code | AENOR |
|---|---|
| Published By | Asociación Española de Normalización |
| Publication Date | 2015-08-01 |
| Pages Count | 31 |
| Language | English |
| File Size | 1.1 MB |
| ICS Codes | 31.080.99 - Other semiconductor devices |
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