{"id":207801,"date":"2024-10-19T13:23:15","date_gmt":"2024-10-19T13:23:15","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/astm-f95-2000\/"},"modified":"2024-10-25T06:05:11","modified_gmt":"2024-10-25T06:05:11","slug":"astm-f95-2000","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/astm\/astm-f95-2000\/","title":{"rendered":"ASTM-F95 2000"},"content":{"rendered":"

ASTM F95-89-Reapproved2000<\/h3>\n

Withdrawn Standard: Standard Test Method for Thickness of Lightly Doped Silicon Epitaxial Layers on Heavily Doped Silicon Substrates Using an Infrared Dispersive Spectrophotometer (Withdrawn 2003)<\/h4>\n
\n

ASTM F95<\/h4>\n

Scope<\/strong><\/p>\n

This standard was transferred to SEMI (www.semi.org) May 2003<\/p>\n

1.1 This test method provides a technique for the measurement of the thickness of epitaxial layers of silicon deposited on silicon substrates. A dispersive infrared spectrophotometer is used. For this measurement, the resistivity of the substrate must be less than 0.02[omega] cm at 23o<\/sup>C and the resistivity of the layer must be greater than 0.1[omega] cm at 23o<\/sup>C.<\/p>\n

1.2 This technique is capable of measuring the thickness of both n<\/i>– and p<\/i>-type layers greater than 2 \u00b5m thick. With reduced precision, the technique may also be applied to both n<\/i>– and p<\/i>-type layers from 0.5 to 2 \u00b5m thick.<\/p>\n

1.3 This test method is suitable for referee measurements.<\/p>\n

1.4This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.<\/i><\/p>\n

Keywords<\/strong><\/p>\n

epi; epi thickness; epitaxial layer; FTIR; index of refraction; IR; layer thickness; spectrophotometer<\/p>\n

ICS Code<\/strong><\/p>\n

ICS Number Code 29.045 (Semiconducting materials)<\/p>\n

DOI:<\/strong> 10.1520\/F0095-89R00<\/p>\n<\/div>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
1<\/td>\nScope
Referenced Documents
Terminology <\/td>\n<\/tr>\n
2<\/td>\nSummary of Test Method
Apparatus
Test Specimen
Preparation of Apparatus
Procedure
FIG. 1 <\/td>\n<\/tr>\n
3<\/td>\nCalculation
TABLE 1 <\/td>\n<\/tr>\n
4<\/td>\nReport
Precision and Bias
TABLE 2
TABLE 3 <\/td>\n<\/tr>\n
5<\/td>\nKeywords
X1. THEORY OF METHOD
X1.1
X1.2
X1.3
X1.4
X1.5
X1.6
X1.7
X1.8
FIG. X1.1 <\/td>\n<\/tr>\n
6<\/td>\nX1.9
X1.10
X1.11
X2. REPEATABILITY AND REPRODUCIBILITY OF MULTILABORATORY TESTING USING FT-IR INSTRUMENTS
X2.1
X2.2
X2.3
TABLE X2.1 <\/td>\n<\/tr>\n
7<\/td>\nTABLE X2.2 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

F95-89(2000) Standard Test Method for Thickness of Lightly Doped Silicon Epitaxial Layers on Heavily Doped Silicon Substrates Using an Infrared Dispersive Spectrophotometer (Withdrawn 2003)<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
ASTM<\/b><\/a><\/td>\n2000<\/td>\n8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":207807,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2637],"product_tag":[],"class_list":{"0":"post-207801","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-astm","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/207801","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/207807"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=207801"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=207801"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=207801"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}